Browse Inventory

Semiconductor Equipment & Parts

RF generators, matching networks, plasma power supplies, mass flow controllers, wafer-handling robots and semiconductor-specific components from Applied Materials, MKS, Advanced Energy, Pearl Kogyo and other fab-equipment makers. A cost-effective source of spares and replacement subsystems for process tools, R&D cleanrooms and refurbishers. Each item is inspected and its condition described before listing.

118 items available

Reno EVC 100195000 500W 400kHz Solid State RF Matching Network

Semiconductor Equipment & Parts

Reno EVC 100195000 500W 400kHz Solid State RF Matching Network

ADTEC AMVG 1500 HLF KZ Automatic Impedance Matching Unit 1500W 13.56MHz Used

Applied Materials 0150 11135 8 Zone Heater Control Assembly 208VAC For Parts

COMDEL CLX 2750 LF Generator

COMDEL CLX 2750 LF Generator

COMDEL CLX 2750 LF Generator

COMDEL CLX 2750 LF Generator

Fujikin MFRC Mass Flow Controller MFRCDR 4CW4 L2L2 10 M3 Japan

Fujikin MFRC Mass Flow Controller MFRCDR 4CW4 L2L2 10 M3 Japan

Sinfonia Technology SBX92304235 TR2 Robot Controller Parts/Repair

Applied Materials AMAT 0090 07099 REV 02 Geronimo Chamber CIOC Controller Used

Applied Materials AMAT 0195 16049 CIOC ECAT MF IO Controller Module Used

Advanced Energy Pinnacle 20kW DC Power Supply 31502411 365 0190 61053 Parts

Industrial RF Module Assembly 853 314106 204 Rev C Parts/Repair

Applied Materials 0190 95119 208VAC System Control Power Distribution Unit Parts

Comet RF Matching Network / Match Unit – P/N 27 432930 00

AD TEC Plasma Technology TX Series RF Generator Rackmount Unit – Untested

Advanced Energy PDX 900 2V 3156024 132 RF Generator 0190 08677 Used Untested

ASE AMVP 5000PSK Rev.E 5kW 13.56MHz Automatic Impedance Matching Unit

Sierra SideTrak 840 Mass Flow Controller 500 SCCM Oxygen 0 5V

Teledyne Hastings HFC 202 Mass Flow Controller 500 SCCM Argon 0 5V

Teledyne Hastings HFC 202 Mass Flow Controller 500 SCCM Oxygen 0 5V