Browse Inventory

Semiconductor Equipment & Parts

RF generators, matching networks, plasma power supplies, mass flow controllers, wafer-handling robots and semiconductor-specific components from Applied Materials, MKS, Advanced Energy, Pearl Kogyo and other fab-equipment makers. A cost-effective source of spares and replacement subsystems for process tools, R&D cleanrooms and refurbishers. Each item is inspected and its condition described before listing.

118 items available

Semiconductor Equipment & Parts

Advanced Energy PDX 2500 MF Generator 27 293721 00 Plasma Power Parts/Repair

AWIS 7302 Branch Circuit & Pneumatic Control Unit Semiconductor System 208V

Brooks Automation Series 8 Robot Controller 002 9400 20 Semiconductor Robot

Teledyne Hastings HFC 202 Mass Flow Controller 500 SCCM Oxygen Used Untested

Meiden SCV 103.3C82HEW CD Vacuum Actuator Assy w/ Vexta PK266 02AR22 Lot 4

Lot of 2 Meiden SCV Vacuum Actuators w/ Vexta PK266 02AR22 Motors

Meiden SCV 103.3C82HEW CD Vacuum Actuator w/ Vexta PK266 02AR22 Motor

Comet Technologies 10kW 13.56MHz RF Match Network 20105342 832 242736 002

Pearl Kogyo CF 500 400K 400kHz 500W RF Power Supply Generator

Advanced Energy AE AZX 90 RF Generator 5031 004 A 115V Plasma System Working

Brooks Automation Series 8 Robot Controller 0501 1575 w/ Teach Pendant Powers On

PCT Systems Megasonic Hyperclean 6000 C/C Generator Controller CFM P/N 8971 05

COMET RF Matching Network 20071327 13.56MHz 5kW Lam Research Match Unit Rev D

COMET RF Matching Network 20071327 13.56MHz 5kW Lam Research Match Unit Rev D

COMET RF Matching Network 20030650 Lam Research Semiconductor Match Unit

Pearl Kogyo CF 500 400K 400kHz 500W RF Power Supply Generator w/ RF Output

Pearl Kogyo CF 500 400K 400kHz 500W RF Power Supply Generator 2019

DAIHEM RMN 20T V RF Auto Matcher Network Semiconductor

DAIHEM FMN 15A V RF Auto Matcher Network Semiconductor

ASE AMVP 5000PSK Rev D 5000W 13.56MHz Impedance Matching Unit Parts

Reno EVC 100195000 Solid State RF Matching Network 500W 400kHz Rev J Used

Applied Materials 8 Zone Heater Control Assembly 208VAC For Parts

ASE AMVP 5000PSK Rev E Automatic Impedance Matching Unit 5000W 13.56MHz Parts

ADTEC AMVG 1000 QQ Rev C Automatic Impedance Matching Unit 1000W 13.56MHz Used